Technology Health Management
The reliable functioning of the future’s high-tech systems and manufacturing processes requires novel techniques for online assessment of the health state of such systems.
Using the improved digital twins developed in Projects 1, 2 and 3, this project aims at developing methods and tools for pro-active and automated health management of manufacturing processes and (high-tech) machines. Here, health management relates to the safeguarding of system performance and system availability through anomaly detection, preventive maintenance and control reconfiguration.
In this project, we will tackle the following scientific challenges:
- To develop methods for technology health management based on synergy between physical models and data-driven approaches.
- To develop novel solutions for anomaly detection and identification, that are directly useful in solutions for decision-making for preventive maintenance and control reconfiguration.
The research in this project will be valorized through application to high-end printers in collaboration with Canon Production Printing and to wafer handler systems for lithography machines in collaboration with VDL-ETG and ASML.
People on Project 4
Project leader: Prof. dr. ir. Nathan van de Wouw
- Dr. ir. C. Murguia, Eindhoven University of Eindhoven
- Prof. dr. B. Jayawardhana, University of Groningen
- Dr. ir. T. Keviczky, Delft University of Technology
- Dr. P. Mohajerin Esfahani, Delft University of Technology
- Dr. M. van Leeuwen, Leiden University
- Prof. dr. ir. J. Post, Philips B.V. & University of Groningen